Nikon Mini StepperNikon Engineering Stepper

Nikon Mini StepperNikon Engineering Stepper

??

?? ?? ???? MEMS ??? ???

MEMS ????? ???? ??

  • 2?6?? ??? ??(NES1), 6?8?? ??? ??(NES2)
  • MEMS? R&D ???? ???? 1?? ?? ??
  • ??? ?? ??? / ??, ??, ?? ? ??? ?? ??
  • ?? DOF? ??? PR ????
  • IR ?? ?????,Back? ????? ??(Option?
  • Small Footprint? ??? ???? ??? ????
??

 Nikon Mini Stepper 

 NES Series-i10

• ??? ???? ???? ??? ?? ?? ?? ???? ???? ?? (44x44mm)
• ???? ??? ?? Throughput ??
• SEMI/ CE ??
• ?????? ??? ?? ???? ????
• ?? ????? Foot print

 Nikon Mini Stepper 

 NES Series-ghi06/i06

• ??? i-line? 22mmx22mm? ?? ?????? ??? ??
• i-line ?????? ??? i-line PR?? ?? ????
• NA? 0.13? ???? ???? ????? ???? ?? ?? ??
• SEMI 2/8 ? NFPA79 ??
• ?????? ??? ?? ???? ????
• ?? ????? Foot print

 Nikon Mini Stepper 

 NES Series-h04/h04A

• LED&MEMS? ???? ?? ?? ??
• ??? ???? ?? Power ? Throughput ??
• 1 Reticle?? 2 Pattern???? Reticle ???? ??  ??
• NES1W-h04/h04A, NES2W-h04/h04A ( CE/SEMI?? ???? )
• ?? ?? ??? Small Footprint

 

      1. Large depth of focus

      – ??? Photo Resist?? ?? ?? (PR 10um ????, L/S 3um)

       – BOW Wafer?? ?? ??(4inch?? BOW 200um??)

     

      2. Smallest Footprint 

      – ?? ?? ??? Footprint ( W: 1150 x D: 1940 x H:2080 )

      

      3. ??? Backside Alignment, IR? Alignment ? ?? ??


4. ??????? ??? Basic Model

      

   Option
  • Auto Wafer Loader
  • Environmental Chamber(Wafer-Cooling)
  • Back Side Alignment System
  • Test Reticle Kit
  • Auto Reticle Slider (for Multi-Pattern Reticle)
  • Reticle Barcorde Reader (for Manual Reticle Slider)
  • Auto Sigma Changer
  • IR Alignment System
  • Recipe Editor
  • Uninterruptible Power Supply(UPS)

??

????NEW
i04		NEW
i05		???
i10A		i10
??NES1 (? 6″) / NES2 (6″ & 8″)
?? (nm)365
?i-line?
??? L/S (?m)1.01.21.83.7
??? ????
??? L/S (?m) *1		0.81.01.32.6
?? ?? (?m) *26101874
?? ?? (mm)15×1522×2250×5044×44
?? (mW/cm2)1000700300300
?? ?? (?m)      (M+3?)0.30.30.60.6
??? ???? 6″6″ & 8″6″ & 8″8″
??? 8″ (WPH)
(100 mJ/cm2)		N/A457171
??? 6″ (WPH)
(100 mJ/cm2)		6281121N/A
?? ??i06ghi06h04h04A
??NES1 (? 6″) / NES2 (6″ & 8″)
?? (nm)365
?i-line?		365-436
?ghi-line?		405
?h-line?
??? L/S (?m)2.02.32.01.6
??? ????
??? L/S (?m) *1		1.41.7N/A
?? ?? (?m) *2221610
?? ?? (mm)22×2215×15
?? (mW/cm2)8001400800
?? ?? (?m)      (M+3?)NES1?0.3??NES2?0.350.3
??? ???6″ & 8″? 6″
??? 8″ (WPH)
(100 mJ/cm2)		4548N/AN/A
??? 6″ (WPH)
(100 mJ/cm2)		828760

???*1:??? ???? ??? ??
*2:??? ???? ???? ??? ?

????

  • Nikon Engineering Stepper i06

  • Nikon Engineering Stepper i10

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