Wafer Handlermechatronic Packing Tool

mPT 150/200:

• Wafer sizes: 150 mm (6”) and 200 mm (8”)
• handling of standard, thin, warped, eWLB, wafer with support ring and MEMS wafers
• highest level of reliability and availability
• optimized footprint
• 5 stations for shipping boxes and packing material
• automatic End Effector changing station
• two cassette stations
• mapping sensor
• pre-aligner for 6″ and 8″
• SECS/GEM interface
• CE certificated
• SEMI standard compliant

mPT 200/300f:

• Wafer size: 200mm (8″) and 300 mm (12”) on frame
• handling of wafers on frame
• highest level of reliability and availability
• two 6 axle robots for optimized footprint
• up to 8 stations for shipping boxes and packing material
• automatic End Effector changing station
• two stations for frame cassettes
• SECS/GEM interface
• CE certificated
• SEMI standard compliant

mPT 200/300:

• Wafer size: 200mm (8″) and 300 mm (12”)
• handling of standard, thin, warped, eWLB, wafer with support ring and MEMS wafers
• highest level of reliability and availability
• two 6 axle robots for optimized footprint
• up to 8 stations for shipping boxes and packing material
• automatic End Effector changing station
• two load-ports
• mapping sensor
• pre-aligner for 8″ and 12″
• SECS/GEM interface
• CE certificated
• SEMI standard compliant

mPT 200/300 neo:

• Wafer size: 200mm (8″) and 300 mm (12”)
• handling of standard, thin, warped, eWLB, wafer with support ring and MEMS wafers
• optimized foodprint
• high troughput
• highest level of reliability and availability
• dual arm 3 axis robot
• station for shipping boxes
• two stations for packing material
• one station for recycling material
• GUI/Operator interface with touchscreen
• two load-ports
• pre-aligner for 8″ and 12″
• CE certificated
• SEMI standard compliant

Configuration Options:

• third station for packing material
• Sorting function w. FOSBs
• OCR / QR / DMC reader for wafer ID
• Bar Code Reader for shipping box ID
• RFID antennas for cassette / FOUP ID
• Various End Effectors with automatic End Effector change station
• SECS/GEM interface
• FFU (filter fan unit) for higher cleanroom class
• Ionizer with temperature and humidity monitoring
• Keyboard, manual Lot ID Reader
• additional load / unload position for external metrology