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Confocal MicroscopeHYBRID CONFOCAL
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Lasertec Confocal Microscope
???? 405nm Laser 2??? ??? ??? HYBRID CONFOCAL
Xenon Lamp? 405nm ???? Laser 2??? ??? ???? ?? ?? ???? ??? ??? ?? ?? HYBRID Confocal ??????.
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??? / ???? ??? ??(Laser Confocal Mode)
405nm ???? Laser ??? ?? ???? ??? ??
1.6?? ?? F.O.V(Field Of View)? ???? ??
??? ???? ?? ? ?? ??? ??? ?? ? 1.6?? F.O.V ??
????? Color Confocal ??
??? ??? ?? ??? Xenon ??? ??
Color Confocal ????? ??? ?? ? ???? ???? ?? ??? ??
?? ??? ?? ??
Confocal? DIC(????) ??? ???? ??? ?? ??? High Contrast? ??(Option)
??? ????
????(Height)
???? : ±? 0 .11+ L/100??m
???? : ? = 0.01?m
????(Surface Roughness)
JIS, ISO ??? ??? ???? ??
??? ???? ??? ??? ???? ??? ??
?2?? ?? : Ra, Rz, Rp, Rv… ?
?3?? ?? : Sa, Sz, Sp, Sv… ?
????(Width and Pitch)
?? ?? ??? ??? ? ??? ??
???? : ±[0.02x(100/???? ??)+L/1000]?m
???? : 3? = 0.01?m
???? ?? ? ??(Analysis of geometric properties)
??, ??, ??? ? 20? ??? ?? ?? ??? ??
6?? ?? ??(Option)
6?? ???? ??? ??? ??? ???? ??
436nm, 486nm, 514nm, 546nm, 578nm, 633nm? 6??
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?1 Based on reference pattern measurement using 150x ( NA0.95) under no vibration condition.
?2 Based on the measurement of VLSI Standards’ step height standards using 100x ( NA0.95) under no vibration condition.
?3 Up to t he maximum distance of objective lens movement.
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HYBRID CONFOCAL (ENG)
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Auto-measurement software
??? ???? ?? ??, ??, ?? ?? ???? ??
Auto-inspection software
Wafer? Glass ?? ?? ?????? ?? ?? All Auto ?? ?? ??
Tags: 2d 미터 교정, 2d 미터 수리, 2차원 미터, 3d 미터, 3D 미터 수리, 백색광과 405nm Laser 2가지의 광원을 사용한 HYBRID CONFOCAL, 수리 cmm 미터, 수리 미터, 수리 현미경, 장비의 기간은 확인해야 함, 장치 교정