Wafer Handler mechatronic Wafer Sorter

mWS 150/200:

• Wafer sizes: 150 mm (6”) and 200 mm (8”)
• Handling of standard, thin, warped, eWLB, wafers with support ring and MEMS wafers
• Highest level of reliability and availability
• Optimized footprint
• Up to six casette stations
• Automatic End Effector changing station
• Two cassette stations
• Mapping sensor
• Pre-aligner for 6″ and 8″
• SECS/GEM interface
• CE certificated
• SEMI standards compliant

mWS 200/300:

• Wafer sizes: 200 mm (8”) and 300 mm (12”)
• Handling of standard, thin, warped, eWLB, wafers with support ring and MEMS wafers
• Highest level of reliability and availability
• One dual arm robot on linear track
• Up to four load ports
• Wafer flipping function
• Automatic End Effector changing station
• Mapping sensor
• Pre-aligner for 8″ and 12″
• SECS/GEM interface
• CE certificated
• SEMI standards compliant