Nikon Wafer LoaderNWL200

 

Nikon Wafer LoaderNWL200

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Wafer Loaders for IC Inspection Microscope

200mm Wafer Loader

– 8″ Wafer ??
– Manual Stage & Focus
– Thin Wafer Loading (100?)
– Macro ???? ??

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Wafer Loaders for IC Inspection Microscope
NWL200

• ??? ?? ???? ??? ?? ???? Wafer ??
• NWL200 ???? ?? ???? ??
• ?? ???? Wafer Loader ??? 100?m ?? Wafer ?? ??
• ??? ??? ??? ?? ???? ??? ??

 Nikon? ???? ???? Thin Wafer Loading 

– Wafer ?????? Thin Wafer? ?? Loading ??

    – ??? ?? ??? ??? NWL Series? ?? 100?m ?? Wafer ??? ??

    – ?? ???? ????? Thin Wafer ?? ??? ???

                                     

Wafer-Sensing ?? ?? 

   – Thin Wafer? ?? Carrier?  ??Sensor? ???? ?? ARM? ???? ??? ??

   – NWL200 Series? Wafer Sensor ??? ???

   – Wafer? ??? ???? Cassettes ??? ?? ??? ??

                                                    

??? ??? & 3?? Mode? Macro ?? ? ??? ?? ?? 

       – Wafer-slot ??? Display&Button?? ??? ??
– ??? ?? ?? ???
– ?? ???? Cycle Time ??
– ?? ??? ( Error? ??? ??Display? ?? ?? )      

                                                     

 ?? ??? ?? ? NWL200 ??

     – ??? ?? ?? ??
– ?? ?? ?? (?? ? ?? Recipe ????)

                                                

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  • Additional Edge-Chipping Detection Function

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