Wafer Loaders for IC Inspection Microscope
NWL200
• ??? ?? ???? ??? ?? ???? Wafer ??
• NWL200 ???? ?? ???? ??
• ?? ???? Wafer Loader ??? 100?m ?? Wafer ?? ??
• ??? ??? ??? ?? ???? ??? ??
– Wafer ?????? Thin Wafer? ?? Loading ??
– ??? ?? ??? ??? NWL Series? ?? 100?m ?? Wafer ??? ??
– ?? ???? ????? Thin Wafer ?? ??? ???


– Thin Wafer? ?? Carrier? ??Sensor? ???? ?? ARM? ???? ??? ??
– NWL200 Series? Wafer Sensor ??? ???
– Wafer? ??? ???? Cassettes ??? ?? ??? ??

??? ??? & 3?? Mode? Macro ?? ? ??? ?? ??
– Wafer-slot ??? Display&Button?? ??? ??
– ??? ?? ?? ???
– ?? ???? Cycle Time ??
– ?? ??? ( Error? ??? ??Display? ?? ?? )

?? ??? ?? ? NWL200 ??
– ??? ?? ?? ??
– ?? ?? ?? (?? ? ?? Recipe ????)

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????

NEL-Series BrochureI(JPN)

NEL-Series BrochureI(ENG)
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Detection of Wafer-Edge Chipping
Additional Edge-Chipping Detection Function
Tags: 2d 미터 교정, 2d 미터 수리, 2차원 미터, 3d 미터, 3D 미터 수리, Nikon Wafer LoaderNWL200, 수리 cmm 미터, 수리 미터, 수리 현미경, 장비의 기간은 확인해야 함, 장치 교정


